Intelligent gripper systems for thin sensor substrates

Country:
Austria

Client:
E+E Elektronik GmbH

Background:
E+E Elektronik is a developer and producer of sensors and measuring transducers for humidity and air velocity based on thin-layer technique sensors. During production of the sensors, it is crucial to avoid particle contamination. By using a gripper based on the Bernoulli-effect it is possible to handle the sensor substrates – thin glass slides – without mechanical contact and hence with minimised risk of contamination. CTR was assigned the task to develop a gripper system capable of picking up the sensor substrates from a pallet and transfer it to a vacuum chuck for further processing without mechanically touching the substrate. After having successfully proven the feasibility of such a system, a number of Bernoulli grippers were ordered and implemented into the production lines of E+E.

CTR services:
CTR optimised the Bernoulli chuck in terms of size and geometry, air gap and holding force. A laboratory set-up, including a sophisticated sensor system for substrate position tracing, was designed and produced to demonstrate the handling process. The grippers where designed to meet the requirements of clean room class 100. The gripper system has been patented.

Project duration:
8 Months

Project scope:
Bernoulli gripper