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MOEMS 1D scanner module

Integration of microsystem components (MOEMS) in the target application: The specially designed one-dimensional MOEMS scanner can greatly simplify and therefore speed up application development of MOEMS-based systems.

Short Description

The specially designed one-dimensional MOEMS scanner can greatly simplify and therefore speed up application development of MOEMS-based systems.

Project background

Researchers at the Fraunhofer Institute for Photonic Microsystems (IPMS) have specialised in developing and manufacturing custom MOEMS scanning mirrors. A "naked" chip does not however deliver any measurement results. The IPMS, HiperScan and CTR therefore joined forces in the COMET programme with a view to producing smart system developments. In the consortium they pooled their expertise in the various areas required ranging from assembly and packaging to electronics.

Project content

In 2009 the work led to a module being developed for one-dimensional MOEMS scanners. The development is a miniaturised platform for operating, controlling and packaging micro scanning mirrors with an oscillating axle. As the scanners are tailored to the specific application, the operating conditions can vary considerably. It was only when the 1D scanner module was developed that system integrators could use this MOEMS technology in an application without too much additional work. Bridging the gap between microsystems technology and the application, it can therefore be seen as an enabling technology for integrating MOEMS scanners in systems.

Project facts

Multifirm project: Functional Modules for Photonic Microsystem Components
Programme: COMET
Partner: Fraunhofer Institute for Photonic Microsystems (FhG IPMS), HiperScan
Sub-project: MOEMS functional modules (FhG IPMS)
Start: April 2008
Duration: 21 months

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