Starting point for innovation

SensSemicon - Intelligent highly integrated sensor systems for predictive maintenance of semiconductor production machines

The SensSemicon project is about developing a network-wireless-sensor-system to make semiconductor manufacturing machines fit for Industry 4.0. The aim is to obtain important data from the inside of the machine under extreme working conditions and to enable predictive maintenance.

Your Contact at CTR

Dr. Christina Hirschl

Smart Systems

Telephone: + 43 (0) 4242 56300

Research Programme

The SensSemicon project is funded by the Rearch Technology and Innovation initiative Silicon! Alps, R & D projects in the field of microelectronics supported by the federal states of Styria and Carinthia.

Relevance and impact

The aim of the SensSemicon project is to explore the technological possibilities for implementing a passive multi-sensor network in order to integrate it into semiconductor production machines.

Currently, modern semiconductor production machines are already working remotely and largely fully automatically. Now it is about enabling a permanent and real-time monitoring of defined parameters during the course of the process.

Industry 4.0: self-controlling and efficient

The results of the collaborative research work should enable reliable information on the internal processes and states of a semiconductor production mesh to be recorded via an integrated sensor network and to communicate these externally via an appropriate interface.

In addition to a state-of-the-art semiconductor production machine, this requires specially smart sensors recording information and transmitting, working under extreme chemical processes, an optimized contactless and wireless detection system, a sophisticated algorithm and a great deal of research know-how.

At the same time, the system should enable identification of multiple different plant components during operation, as well as record measurement and process data. The permanent and autonomous recording of the system status in real time should enable not only condition-oriented but also predictive maintenance. In this way, forecasts are to be made possible, at which time the occurrence of a fault is to be expected. As a result, production-downtimes can be reduced, productivity increased and resources used optimally.

SensSemicon Consortium

The research consortium consists of four partners who work along the entire value chain of an Industry 4.0 sensor network. On the part of industry Lam Research brings in the semiconductor machines, NXP provides the corresponding RFID chips including the wireless KNOW-HOW. The research center CTR is focusing on the necessary integration and sensor technology know-how and the partner erfideo uses algorithms to ensure complete and real-time data acquisition.


Project Facts

Project: SensSemcion - "Intelligent highly integrated sensor systems for predictive maintenance of semiconductor production machines"
Programme: Initiative "Silicon! Alps"
Project leader: CTR Carinthian Tech Research
Duration: 2 years (01/2018 - 12/2019)
Consortium: 4 partners 
Project volume: € 826,881 Financing 30 % Industry | 70 % research funding

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