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Smart baking tray

New sensor development for better baking results: The specially developed SAW sensors enable wireless measurements at extreme temperatures and provide pressure information during the baking process.

Short Description

The specially developed SAW sensors enable wireless measurements at extreme temperatures and provide pressure information during the baking process.

Project background

Today’s manufacturers produce wafers in state-of-the-art facilities and bake them on huge trays. Their quality not only depends on the recipe but also physical baking parameters such as pressure and temperature. It is these parameters that the new smart baking tray can now detect even while the wafers are baking.

Project content

The project centred on developing wireless surface acoustic wave (SAW) sensors capable of transmitting several parameters reliably and without any errors: each individual baking tray’s temperature, pressure and identification. What was a particular challenge was the extremely hot baking temperature of up to 180°C and measuring the pressure without affecting the shape of the wafers. The successful development is a global innovation, as there is no published evidence of combined SAW pressure and temperature sensors that can be used at such high baking temperatures. We have filed a patent for the sensor system.

Project facts

Multifirm project: Surface Acoustic Wave Sensors for Pressure and Force
Programme: COMET
Partner: Haas, Unisensor
Sub-project: Smart baking tray (Haas)
Start: February 2010
Duration: 14 months

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