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INKJET-PRINTED CAPACITIVE SENSORS FOR HIGH BANDWIDTH NANOMETER POSITION SENSING AN APPLICATION TO A RESONANT MEMS IN A FOURIER TRANSFORM INFRARED SPECTROMETER

Lisa-Marie Faller Institute of Smart Systems Technologies Abstract Alpen-Adria-Universität Klagenfurt

Abstract: To enable the fabrication of less expensive, light-weight and portable spectrometers, resonantly moving Micro-Electro-Mechanical System (MEMS) mirrors are employed. We show that further miniaturization and increased spectral resolution can be achieved with an inkjet-printed capacitive position sensor with nanometer resolution in a metal 3D-printed package. Very high resolutions of r espos < 50nm as required in, e.g., the spectrometer application, together with a wide necessary measurement range of rm = 1000μm, at an average distance of d0 = 1000μm, additionally motivate the development of a customized analog amplifier chain and the implementation of a laboratory demonstrator: an adaptable, (’all-digital’), Field Programmable Gate Array (FPGA)-based sensor evaluation platform, which is also fully adaptable to other sensing principles. The platform presented for the feasibility demonstration, provides high sampling rates (up to ≈ 100MS/s) and enables generation of trigger signals, i.e. the mirror control signal. It further enables flexible choices of bandwidth and measurement signal frequency, and allows for separation in frequency from coupling parasitics. Noise analysis and stochastic position estimation are applied to analyse and overcome remaining noise limitations and time-dependent uncertainty variations inflicted by the measurement- and system setups. Optimal system configurations and measurement models are determined and analysed using Finite Element Method simulations in combination with numerical optimization. These models, combined with a mirror motion model, are employed in an Extended Kalman Filter to enable nanometer resolution, independent of the measurement bandwidth. Thus, we can demonstrate a way to achieve very high position resolutions with low latency and little to no influence of parasitic stray electrical signals (e.g. the mirror excitation signal uexc = 90V). Measurements are done, using a demonstrator of the inkjet-printed capacitive sensor on a 3D-printed copper housing.

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